Description
High Reliability and Productivity Coater Developer (5C/5D)Configuration
High Reliability and Productivity Coater Developer (5C/5D)OEM Model Description
The CLEAN TRACK™ LITHIUS™ Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK™ ACT™ series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. Successor to the ACT - 200mm or 300mm, more modules and faster throughput (150 wph).Documents
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TEL / TOKYO ELECTRON
LITHIUS
Verified
CATEGORY
Coaters & Developers
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
75741
Wafer Sizes:
12"/300mm
Vintage:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
LITHIUS
Verified
CATEGORY
Coaters & Developers
Last Verified: 16 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
75741
Wafer Sizes:
12"/300mm
Vintage:
2006
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
High Reliability and Productivity Coater Developer (5C/5D)Configuration
High Reliability and Productivity Coater Developer (5C/5D)OEM Model Description
The CLEAN TRACK™ LITHIUS™ Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK™ ACT™ series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. Successor to the ACT - 200mm or 300mm, more modules and faster throughput (150 wph).Documents
No documents
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