Description

3C/2D

Configuration

No Configuration

OEM Model Description

The CLEAN TRACK™ LITHIUS™ Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK™ ACT™ series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. Successor to the ACT - 200mm or 300mm, more modules and faster throughput (150 wph).

Documents

No documents

TEL / TOKYO ELECTRON

LITHIUS

Verified

Coaters & Developers

Last Verified: Over 30 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

83628

Wafer Sizes:

12"/300mm

Vintage:

2006

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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