Description

MISS PARTS 2 AD HOT PLATE

Configuration

CLHR HCP/TRS 2-38 3-6 2-40 3-7 2-41 3-9 2-42 3-8 2-43 CLHR 2-44 3-10 2-49 3-12 HCP 3-14 2-36 3-15 HCP/TRS 3-16 2-34 3-17 2-35 3-18 2-32 3-23 2-33 CLHR 4-12 5-6 4-14 5-7 4-15 CPHP 4-16 5-8 4-17 5-10 4-18 5-12 4-23 5-14 HCP 5-15 4-10 5-16 HCP/TRS 5-17 4-8 5-18 4-9 5-23 4-7 4-6

OEM Model Description

The CLEAN TRACK™ LITHIUS™ Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK™ ACT™ series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. Successor to the ACT - 200mm or 300mm, more modules and faster throughput (150 wph).

Documents

TEL LITHIUS.pdf

TEL / TOKYO ELECTRON

LITHIUS

Verified

Coaters & Developers

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Deinstalled

Product ID:

130980

Wafer Sizes:

Unknown

Vintage:

2001

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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