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LITHIUS

TEL / TOKYO ELECTRON LITHIUS

Description

High Reliability and Productivity Coater Developer

Configuration

High Reliability and Productivity Coater Developer

OEM Model Description

The CLEAN TRACK™ LITHIUS™ Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK™ ACT™ series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. Successor to the ACT - 200mm or 300mm, more modules and faster throughput (150 wph).

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TEL / TOKYO ELECTRON

LITHIUS

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Verified

CATEGORY

Coaters & Developers

Last Verified: 17 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

52079

Wafer Sizes:

12"/300mm

Vintage:

2007

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LITHIUS

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LITHIUS

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Verified

CATEGORY

Coaters & Developers

Last Verified: 17 days ago

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

52079

Wafer Sizes:

12"/300mm

Vintage:

2007

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

High Reliability and Productivity Coater Developer

Configuration

High Reliability and Productivity Coater Developer

OEM Model Description

The CLEAN TRACK™ LITHIUS™ Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK™ ACT™ series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. Successor to the ACT - 200mm or 300mm, more modules and faster throughput (150 wph).

Documents

No documents

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701 Brazos St, Suite 930.

Austin, TX 78701

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