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TEL / TOKYO ELECTRON LITHIUS
    Description
    TRACK
    Configuration
    High Reliability and Productivity Coater Developer (5C/5D)
    OEM Model Description
    The CLEAN TRACK™ LITHIUS™ Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK™ ACT™ series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. Successor to the ACT - 200mm or 300mm, more modules and faster throughput (150 wph).
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    TEL / TOKYO ELECTRON

    LITHIUS

    verified-listing-icon

    Verified

    CATEGORY
    Coaters & Developers

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    52079


    Wafer Sizes:

    12"/300mm


    Vintage:

    2007


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    Money Back Guarantee
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    Transaction Insured by Moov
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    Refurbishment Services
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    TEL / TOKYO ELECTRON LITHIUS

    TEL / TOKYO ELECTRON

    LITHIUS

    Coaters & Developers
    Vintage: 2005Condition: Used
    Last VerifiedOver 60 days ago

    TEL / TOKYO ELECTRON

    LITHIUS

    verified-listing-icon
    Verified
    CATEGORY
    Coaters & Developers
    Last Verified: Over 60 days ago
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    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    52079


    Wafer Sizes:

    12"/300mm


    Vintage:

    2007


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    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    TRACK
    Configuration
    High Reliability and Productivity Coater Developer (5C/5D)
    OEM Model Description
    The CLEAN TRACK™ LITHIUS™ Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK™ ACT™ series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. Successor to the ACT - 200mm or 300mm, more modules and faster throughput (150 wph).
    Documents

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