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LITHIUS

TEL / TOKYO ELECTRON LITHIUS

Description

High Reliability and Productivity Coater Developer (5C/5D)

Configuration

High Reliability and Productivity Coater Developer (5C/5D)

OEM Model Description

The CLEAN TRACK™ LITHIUS™ Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK™ ACT™ series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. Successor to the ACT - 200mm or 300mm, more modules and faster throughput (150 wph).

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TEL / TOKYO ELECTRON

LITHIUS

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CATEGORY

Coaters & Developers

Last Verified: 17 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

52082

Wafer Sizes:

12"/300mm

Vintage:

2005

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TEL / TOKYO ELECTRON

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LITHIUS

TEL / TOKYO ELECTRON

LITHIUS

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CATEGORY

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Last Verified: 17 days ago

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

52082

Wafer Sizes:

12"/300mm

Vintage:

2005

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

High Reliability and Productivity Coater Developer (5C/5D)

Configuration

High Reliability and Productivity Coater Developer (5C/5D)

OEM Model Description

The CLEAN TRACK™ LITHIUS™ Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK™ ACT™ series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. Successor to the ACT - 200mm or 300mm, more modules and faster throughput (150 wph).

Documents

No documents

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701 Brazos St, Suite 930.

Austin, TX 78701

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