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6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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LAM RESEARCH / NOVELLUS INOVA
    Description
    No description
    Configuration
    -P/N#: 27-156710-00 CONTROLLER,I/O,DUAL CAPACITY -P/N#: 02-125046-00 ASSY,HCM APVD ISIOC -P/N#: 02-145222-00 ASSY,ETCH ISIOC -P/N#:02-124499-00 ASSY,CASS FIELD CONN -P/N#: 02-121693-00 ASSY,PCA,TRANSER FIELD CONN -P/N#: 02-124482-00 ASSY,LOAD FIELD CONN,ISIOC -P/N#: 02-131736-00 ISIOC,HI-LO TRANSFER -P/N#: 02-131473-00 ASSY,ISIOC,LIQ COOLED PVD-PVD -P/N#: 02-124572-00 OBSOLETE, USE 02-131473-00 -P/N#: 02-145223-00 ASSY,BB-ETCH ISIOC
    OEM Model Description
    The INOVA system, which is in the final stages of its development, is an advanced PVD system that delivers Maxfill aluminum and superior Ti/Ti-nitride film quality with excellent particle performance. Maxfill is an innovative, low-pressure, low-k compatible process for aluminum via fill. The Ti/TiN process is in production with Controlled Divergence Technology (CDS). The INOVA is a multi-chamber single wafer processing system. INOVA(TM) Tantalum films are designed to enable barriers for copper metallization.
    Documents

    No documents

    LAM RESEARCH / NOVELLUS

    INOVA

    verified-listing-icon

    Verified

    CATEGORY
    CVD

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Parts Tool


    Operational Status:

    Unknown


    Product ID:

    114349


    Wafer Sizes:

    Unknown


    Vintage:

    Unknown


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
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    LAM RESEARCH / NOVELLUS INOVA

    LAM RESEARCH / NOVELLUS

    INOVA

    CVD
    Vintage: 2012Condition: Used
    Last VerifiedOver 60 days ago

    LAM RESEARCH / NOVELLUS

    INOVA

    verified-listing-icon
    Verified
    CATEGORY
    CVD
    Last Verified: Over 60 days ago
    listing-photo-96ba37d50a40489a96b93e31701029af-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    Key Item Details

    Condition:

    Parts Tool


    Operational Status:

    Unknown


    Product ID:

    114349


    Wafer Sizes:

    Unknown


    Vintage:

    Unknown


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    -P/N#: 27-156710-00 CONTROLLER,I/O,DUAL CAPACITY -P/N#: 02-125046-00 ASSY,HCM APVD ISIOC -P/N#: 02-145222-00 ASSY,ETCH ISIOC -P/N#:02-124499-00 ASSY,CASS FIELD CONN -P/N#: 02-121693-00 ASSY,PCA,TRANSER FIELD CONN -P/N#: 02-124482-00 ASSY,LOAD FIELD CONN,ISIOC -P/N#: 02-131736-00 ISIOC,HI-LO TRANSFER -P/N#: 02-131473-00 ASSY,ISIOC,LIQ COOLED PVD-PVD -P/N#: 02-124572-00 OBSOLETE, USE 02-131473-00 -P/N#: 02-145223-00 ASSY,BB-ETCH ISIOC
    OEM Model Description
    The INOVA system, which is in the final stages of its development, is an advanced PVD system that delivers Maxfill aluminum and superior Ti/Ti-nitride film quality with excellent particle performance. Maxfill is an innovative, low-pressure, low-k compatible process for aluminum via fill. The Ti/TiN process is in production with Controlled Divergence Technology (CDS). The INOVA is a multi-chamber single wafer processing system. INOVA(TM) Tantalum films are designed to enable barriers for copper metallization.
    Documents

    No documents

    Similar Listings
    View All
    LAM RESEARCH / NOVELLUS INOVA

    LAM RESEARCH / NOVELLUS

    INOVA

    CVDVintage: 2012Condition: UsedLast Verified:Over 60 days ago
    LAM RESEARCH / NOVELLUS INOVA

    LAM RESEARCH / NOVELLUS

    INOVA

    CVDVintage: 1999Condition: UsedLast Verified:Over 60 days ago
    LAM RESEARCH / NOVELLUS INOVA

    LAM RESEARCH / NOVELLUS

    INOVA

    CVDVintage: 2012Condition: UsedLast Verified:Over 60 days ago