Skip to main content
We value your privacy

We and our selected partners use cookies to enhance your browsing experience, serve personalized content, and analyze our traffic. By clicking "Accept All", you consent to our use of cookies. Read More

Moov logo

Moov Icon
LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
  • LAM RESEARCH / NOVELLUS INOVA
Description
PVD
Configuration
PVD
OEM Model Description
The INOVA system, which is in the final stages of its development, is an advanced PVD system that delivers Maxfill aluminum and superior Ti/Ti-nitride film quality with excellent particle performance. Maxfill is an innovative, low-pressure, low-k compatible process for aluminum via fill. The Ti/TiN process is in production with Controlled Divergence Technology (CDS). The INOVA is a multi-chamber single wafer processing system. INOVA(TM) Tantalum films are designed to enable barriers for copper metallization.
Documents

No documents

CATEGORY
CVD

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

21615


Wafer Sizes:

12"/300mm


Vintage:

2012


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View All

LAM RESEARCH / NOVELLUS

INOVA

verified-listing-icon
Verified
CATEGORY
CVD
Last Verified: Over 60 days ago
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/fTjZDS6B6u8tAvwMoSkZDNPgyHZyxUsnzJ7MFPZeaPY_20190315_103049_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/WXQinu83sJYAftUE9edivRerzUkh3w1cBVNYo0GDc3E_20190315_103049_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/3KQyGSUnvY0UJWhwDKjtX3nKAEks7dN12unu7BR275s_20190315_103049_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/kqIUtoptybVF6cd5g3e3Y_4pZC5OH_n1LJ1rWazeBCQ_20190315_103049_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/YN2wyvQWtffSccbsB6vbb010sgP9hEdB-7PkLY64zrc_20190315_103049_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/fl7vEOg-G2_gEuIuGmVPSTWaq6251-eOXb7qx7FuqvU_20190315_103049_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/DXqIO0nBVe5wnlujr-PGoZ1Xl2h48-DUkRYpe43K7T0_20190315_103049_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/wODgLBKyG9m_qbckkbzXwoSTaa5W2_eczM-9qOlFM8w_20190315_103049_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/xKqPelXRs-QQCDVYEFG3qyYHW4SuFnRgq7HvO6JtHro_20190315_103049_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/WkH9ZKRH7PkSKBX5HeH95Gy-uSgydhShee1tCyVNgyg_20190315_103049_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/dTsUl7IWcrCOjLzlt_5cQC3vSLKLMrkn83_j_cnJJ7I_20190315_103052_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/vToy5LSoc4uIrvJO8_49_mkloSlvAFB_k-1BjHyL6l8_20190315_103051_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/ej9nn3jlfBt-cTSg7AyQqM9ymMNdSq3QVam6AVYWKz4_20190315_103051_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/tfmFIiThkmlYQNbrw2twl8pSQp6zhjBIBXe-VvJ5kkU_20190315_103051_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/0tt5f_X8mtYlLeN7NjrsBEAO4ykJvc0oPr38IuAWOBs_20190315_103052_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/Zr0sXmWAsMzCAG-fwbFnhL-Eg54GHK-WeBfsz5kfpP4_20190315_103052_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/xHPkTntMHVZa4TQnJczaf7epr-j6QwOylKqBxeKhgYA_20190315_103052_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/PI-JI3LAoSjQrWqAjklO3EbEkVoB-WeQisGbZUeALms_20190315_103052_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/Q3e9ZA_EOkMbhiD3dZnlF9HmgcH2zwGJN9ErqJ-zAe4_20190315_103052_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/KhdOKni21UxVRHPdk8DFYjsn5dYCBQKHgqKVRKxOmcw_20190315_103051_f
listing-photo-TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/TrJo5LjiMfL9ISKPnBm2rI4Uwdn0QYucV3pBrfLXWDI/CC2YUZrHcb7OqUHjjV4lb0RBO51GZmDiuJ0W7AGoNN4_20190315_103054_f
Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

21615


Wafer Sizes:

12"/300mm


Vintage:

2012


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
PVD
Configuration
PVD
OEM Model Description
The INOVA system, which is in the final stages of its development, is an advanced PVD system that delivers Maxfill aluminum and superior Ti/Ti-nitride film quality with excellent particle performance. Maxfill is an innovative, low-pressure, low-k compatible process for aluminum via fill. The Ti/TiN process is in production with Controlled Divergence Technology (CDS). The INOVA is a multi-chamber single wafer processing system. INOVA(TM) Tantalum films are designed to enable barriers for copper metallization.
Documents

No documents

Similar Listings
View All