Description

No description

Configuration

PU_I-Line

OEM Model Description

The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.

Documents

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TEL / TOKYO ELECTRON

ACT 12

Verified

Coaters & Developers

Last Verified: Yesterday

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

144856

Wafer Sizes:

12"/300mm

Vintage:

2002

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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