Description
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Direction: RIGHT HAND SIDE 4 Blocks Interfaced; Cassette, 2 Process, & Stepper Interface 4 Wafer Transfer Robot Arms; Cassette, 2 Process, & Stepper Interface Control Module on cassette end station (CES) 3 Station 25 wafer FOUP Interface is to Ultratech T-300 Cassette rotators and platforms Facility sensors for DI water and Caustic exhaust Coater (COT) - quantity 1 Coater (PCT) - quantity 2 2 Nozzles w/ Temperature Control Chuck vacuum sensor Millipore P-250 pumps SS 0.3mm diameter side rinse nozzle w/ flow meter 1 set of 2 SS 0.3mm diameter back rinse nozzles 1 SS 0.3mm diameter back rinse nozzle for chemical 1 1 SS 0.3mm diameter back rinse nozzle for chemical 2 Bulk-FSI system for side and back rinse PTI mass flow controller per module PP cup w/ sensor Chuck Up VAC Off Switch Addition of drip traysOEM Model Description
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.Documents
TEL / TOKYO ELECTRON
ACT 12
Verified
CATEGORY
Coaters & Developers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
100270
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
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Refurbishment Services
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TEL / TOKYO ELECTRON
ACT 12
CATEGORY
Coaters & Developers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
100270
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available