ACT 12
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Coaters & DevelopersOverview
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.
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TEL / TOKYO ELECTRON
ACT 12
Coaters & DevelopersVintage: Condition: UsedLast VerifiedOver 60 days agoTEL / TOKYO ELECTRON
ACT 12
Coaters & DevelopersVintage: 1998Condition: UsedLast VerifiedOver 60 days agoTEL / TOKYO ELECTRON
ACT 12
Coaters & DevelopersVintage: 1998Condition: UsedLast VerifiedOver 60 days agoTEL / TOKYO ELECTRON
ACT 12
Coaters & DevelopersVintage: Condition: UsedLast VerifiedOver 60 days ago
TEL / TOKYO ELECTRON
ACT 12
Coaters & DevelopersVintage: 2002Condition: UsedLast VerifiedOver 60 days agoTEL / TOKYO ELECTRON
ACT 12
Coaters & DevelopersVintage: Condition: UsedLast VerifiedOver 60 days agoTEL / TOKYO ELECTRON
ACT 12
Coaters & DevelopersVintage: Condition: RefurbishedLast VerifiedOver 60 days agoTEL / TOKYO ELECTRON
ACT 12
Coaters & DevelopersVintage: 2003Condition: UsedLast VerifiedOver 60 days ago