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TEL / TOKYO ELECTRON ACT 12
    Description
    No description
    Configuration
    TEL Clean Track ACT 12 Single Block with 1Coat + 2Develop + 1Interface
    OEM Model Description
    The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.
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    TEL / TOKYO ELECTRON

    ACT 12

    verified-listing-icon

    Verified

    CATEGORY
    Coaters & Developers

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    84799


    Wafer Sizes:

    12"/300mm


    Vintage:

    1998


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    TEL / TOKYO ELECTRON ACT 12

    TEL / TOKYO ELECTRON

    ACT 12

    Coaters & Developers
    Vintage: 0Condition: Used
    Last VerifiedOver 60 days ago

    TEL / TOKYO ELECTRON

    ACT 12

    verified-listing-icon
    Verified
    CATEGORY
    Coaters & Developers
    Last Verified: Over 60 days ago
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    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    84799


    Wafer Sizes:

    12"/300mm


    Vintage:

    1998


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    Description
    No description
    Configuration
    TEL Clean Track ACT 12 Single Block with 1Coat + 2Develop + 1Interface
    OEM Model Description
    The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.
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