Description
300MM PVDConfiguration
300MM PVDOEM Model Description
The INOVA system, which is in the final stages of its development, is an advanced PVD system that delivers Maxfill aluminum and superior Ti/Ti-nitride film quality with excellent particle performance. Maxfill is an innovative, low-pressure, low-k compatible process for aluminum via fill. The Ti/TiN process is in production with Controlled Divergence Technology (CDS). The INOVA is a multi-chamber single wafer processing system. INOVA(TM) Tantalum films are designed to enable barriers for copper metallization.Documents
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LAM RESEARCH / NOVELLUS
INOVA
Verified
CATEGORY
Deposition
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
15719
Wafer Sizes:
12"/300mm
Vintage:
2012
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Logistics Support
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Money Back Guarantee
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Transaction Insured by Moov
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Refurbishment Services
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LAM RESEARCH / NOVELLUS
INOVA
Verified
CATEGORY
Deposition
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
15719
Wafer Sizes:
12"/300mm
Vintage:
2012
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
300MM PVDConfiguration
300MM PVDOEM Model Description
The INOVA system, which is in the final stages of its development, is an advanced PVD system that delivers Maxfill aluminum and superior Ti/Ti-nitride film quality with excellent particle performance. Maxfill is an innovative, low-pressure, low-k compatible process for aluminum via fill. The Ti/TiN process is in production with Controlled Divergence Technology (CDS). The INOVA is a multi-chamber single wafer processing system. INOVA(TM) Tantalum films are designed to enable barriers for copper metallization.Documents
No documents