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6" Fab For Sale from Moov - Click Here to Learn More

KLA SP1-TBI

Description

No description

Configuration

No Configuration

OEM Model Description

The SP1 is an unpatterned surface inspection system that can be configured with KLA-Tencor’s Triple-Beam Illumination™ (TBI) technology for exceptional sensitivity on rough films. This technology adds an oblique illumination beam to the SP1’s standard optical configuration, enhancing its ability to capture and distinguish all variations of pits, including crystal originated pits (COPs), from particles. The TBI option maintains the SP1’s axi-symmetric design and allows the use of Adaptive Collection Optics for superior capture of defects on different substrate surfaces.

Documents

No documents

KLA

SP1-TBI

verified-listing-icon

Verified

CATEGORY

Defect Inspection

Last Verified: 20 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

117460

Wafer Sizes:

Unknown

Vintage:

2001

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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verified-listing-icon

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Last Verified: 20 days ago

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

117460

Wafer Sizes:

Unknown

Vintage:

2001

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

No description

Configuration

No Configuration

OEM Model Description

The SP1 is an unpatterned surface inspection system that can be configured with KLA-Tencor’s Triple-Beam Illumination™ (TBI) technology for exceptional sensitivity on rough films. This technology adds an oblique illumination beam to the SP1’s standard optical configuration, enhancing its ability to capture and distinguish all variations of pits, including crystal originated pits (COPs), from particles. The TBI option maintains the SP1’s axi-symmetric design and allows the use of Adaptive Collection Optics for superior capture of defects on different substrate surfaces.

Documents

No documents

Similar Listings

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