Description

No description

Configuration

3 Station Cassette Loader demo attached.

OEM Model Description

The SP1 is an unpatterned surface inspection system that can be configured with KLA-Tencor’s Triple-Beam Illumination™ (TBI) technology for exceptional sensitivity on rough films. This technology adds an oblique illumination beam to the SP1’s standard optical configuration, enhancing its ability to capture and distinguish all variations of pits, including crystal originated pits (COPs), from particles. The TBI option maintains the SP1’s axi-symmetric design and allows the use of Adaptive Collection Optics for superior capture of defects on different substrate surfaces.

Documents

demo2.mov

demo1.mov

KLA

SP1-TBI

Verified

Defect Inspection

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

123852

Wafer Sizes:

8"/200mm, 12"/300mm

Vintage:

2007

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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