SP1-TBI
Category
Defect InspectionOverview
The SP1 is an unpatterned surface inspection system that can be configured with KLA-Tencor’s Triple-Beam Illumination™ (TBI) technology for exceptional sensitivity on rough films. This technology adds an oblique illumination beam to the SP1’s standard optical configuration, enhancing its ability to capture and distinguish all variations of pits, including crystal originated pits (COPs), from particles. The TBI option maintains the SP1’s axi-symmetric design and allows the use of Adaptive Collection Optics for superior capture of defects on different substrate surfaces.
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16
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KLA
SP1-TBI
Defect InspectionVintage: Condition: UsedLast Verified4 days agoKLA
SP1-TBI
Defect InspectionVintage: Condition: RefurbishedLast Verified3 days agoKLA
SP1-TBI
Defect InspectionVintage: Condition: Parts ToolLast VerifiedOver 60 days agoKLA
SP1-TBI
Defect InspectionVintage: 2003Condition: UsedLast VerifiedOver 60 days ago
KLA
SP1-TBI
Defect InspectionVintage: 2006Condition: RefurbishedLast VerifiedOver 30 days agoKLA
SP1-TBI
Defect InspectionVintage: 2000Condition: RefurbishedLast VerifiedOver 60 days agoKLA
SP1-TBI
Defect InspectionVintage: Condition: UsedLast VerifiedOver 60 days agoKLA
SP1-TBI
Defect InspectionVintage: 2000Condition: RefurbishedLast VerifiedOver 60 days ago