Description
Copper onlyConfiguration
450 MHz Computer (800Mhz to confirm) Win NT KLA Software 4.1 (New hardrive will be provided) JDSU 30 mw laser Normal (sensitivity 0.080Um) and Oblique (sensitivity 0.060 um) incidence SECS / GEM HSMS DIC XY coordinates Vacuum Handler Dual 300 FIMS Universal Load poarts 300 mm (2 of them) BlowerOEM Model Description
The SP1 is an unpatterned surface inspection system that can be configured with KLA-Tencor’s Triple-Beam Illumination™ (TBI) technology for exceptional sensitivity on rough films. This technology adds an oblique illumination beam to the SP1’s standard optical configuration, enhancing its ability to capture and distinguish all variations of pits, including crystal originated pits (COPs), from particles. The TBI option maintains the SP1’s axi-symmetric design and allows the use of Adaptive Collection Optics for superior capture of defects on different substrate surfaces.Documents
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KLA
SP1-TBI
Verified
CATEGORY
Defect Inspection
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
78031
Wafer Sizes:
8"/200mm, 12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA
SP1-TBI
CATEGORY
Defect Inspection
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
78031
Wafer Sizes:
8"/200mm, 12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Copper onlyConfiguration
450 MHz Computer (800Mhz to confirm) Win NT KLA Software 4.1 (New hardrive will be provided) JDSU 30 mw laser Normal (sensitivity 0.080Um) and Oblique (sensitivity 0.060 um) incidence SECS / GEM HSMS DIC XY coordinates Vacuum Handler Dual 300 FIMS Universal Load poarts 300 mm (2 of them) BlowerOEM Model Description
The SP1 is an unpatterned surface inspection system that can be configured with KLA-Tencor’s Triple-Beam Illumination™ (TBI) technology for exceptional sensitivity on rough films. This technology adds an oblique illumination beam to the SP1’s standard optical configuration, enhancing its ability to capture and distinguish all variations of pits, including crystal originated pits (COPs), from particles. The TBI option maintains the SP1’s axi-symmetric design and allows the use of Adaptive Collection Optics for superior capture of defects on different substrate surfaces.Documents
No documents