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KLA SURFSCAN 6420
    Description
    No description
    Configuration
    Power: 220V 50Hz 1 Phase
    OEM Model Description
    The Surfscan 6420 detects submicron defects on metal films and rough surfaces but still provides sensitivity down to 0.1 micron on polished silicon. It is effective for detecting defects on non-uniform films, a critical requirement for CMP applications.
    Documents

    No documents

    KLA

    SURFSCAN 6420

    verified-listing-icon

    Verified

    CATEGORY
    Defect Inspection

    Last Verified: 4 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    152979

    Wafer Sizes:

    Unknown

    Vintage:

    1995

    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
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    verified-listing-icon
    Verified
    CATEGORY
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    Last Verified: 4 days ago
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    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    152979

    Wafer Sizes:

    Unknown

    Vintage:

    1995

    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    Power: 220V 50Hz 1 Phase
    OEM Model Description
    The Surfscan 6420 detects submicron defects on metal films and rough surfaces but still provides sensitivity down to 0.1 micron on polished silicon. It is effective for detecting defects on non-uniform films, a critical requirement for CMP applications.
    Documents

    No documents

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