SURFSCAN 6420
Category
Defect InspectionOverview
The Surfscan 6420 detects submicron defects on metal films and rough surfaces but still provides sensitivity down to 0.1 micron on polished silicon. It is effective for detecting defects on non-uniform films, a critical requirement for CMP applications.
Active Listings
11
Services
Inspection, Insurance, Appraisal, Logistics
Top Listings
KLA
SURFSCAN 6420
Defect InspectionVintage: 1996Condition: UsedLast VerifiedOver 60 days agoKLA
SURFSCAN 6420
Defect InspectionVintage: 1996Condition: UsedLast VerifiedOver 60 days agoKLA
SURFSCAN 6420
Defect InspectionVintage: 1997Condition: UsedLast VerifiedOver 60 days agoKLA
SURFSCAN 6420
Defect InspectionVintage: 1998Condition: UsedLast VerifiedOver 60 days ago
KLA
SURFSCAN 6420
Defect InspectionVintage: 1997Condition: UsedLast VerifiedOver 60 days agoKLA
SURFSCAN 6420
Defect InspectionVintage: 1998Condition: UsedLast VerifiedOver 60 days agoKLA
SURFSCAN 6420
Defect InspectionVintage: 1996Condition: UsedLast VerifiedOver 60 days agoKLA
SURFSCAN 6420
Defect InspectionVintage: Condition: UsedLast VerifiedOver 30 days ago