Description
-Dimensions: 80cm * 85cm * 188cm -Weight: 330kgConfiguration
-Non-patterned surface inspection system -0.12 micron defect sensitivity @ 95% capture, based on PSL Standards -0.02 ppm haze sensitivity -Wavelength 488 nm, 30mw Ar laser, blue laser, spot size 90μ -Scan frequency 170 Hz; scan pitch: 10, 20 and 40μ -Throughput 120/6" wph -Single puck handling from single cassette or platform -Win 98 software, CD ROM writer, software version: 4.2 -XY coordinates, GEM SECS: options availableOEM Model Description
The Surfscan 6420 detects submicron defects on metal films and rough surfaces but still provides sensitivity down to 0.1 micron on polished silicon. It is effective for detecting defects on non-uniform films, a critical requirement for CMP applications.Documents
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KLA
SURFSCAN 6420
Verified
CATEGORY
Defect Inspection
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
113988
Wafer Sizes:
4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm
Vintage:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA
SURFSCAN 6420
CATEGORY
Defect Inspection
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
113988
Wafer Sizes:
4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm
Vintage:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
-Dimensions: 80cm * 85cm * 188cm -Weight: 330kgConfiguration
-Non-patterned surface inspection system -0.12 micron defect sensitivity @ 95% capture, based on PSL Standards -0.02 ppm haze sensitivity -Wavelength 488 nm, 30mw Ar laser, blue laser, spot size 90μ -Scan frequency 170 Hz; scan pitch: 10, 20 and 40μ -Throughput 120/6" wph -Single puck handling from single cassette or platform -Win 98 software, CD ROM writer, software version: 4.2 -XY coordinates, GEM SECS: options availableOEM Model Description
The Surfscan 6420 detects submicron defects on metal films and rough surfaces but still provides sensitivity down to 0.1 micron on polished silicon. It is effective for detecting defects on non-uniform films, a critical requirement for CMP applications.Documents
No documents