Skip to main content
We value your privacy

We and our selected partners use cookies to enhance your browsing experience, serve personalized content, and analyze our traffic. By clicking "Accept All", you consent to our use of cookies. Read More

Moov logo

Moov Icon
TEL / TOKYO ELECTRON ACT 12
  • TEL / TOKYO ELECTRON ACT 12
  • TEL / TOKYO ELECTRON ACT 12
  • TEL / TOKYO ELECTRON ACT 12
Description
Single Block (Resist Developer)
Configuration
No Configuration
OEM Model Description
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.
Documents

No documents

CATEGORY
Coaters & Developers

Last Verified: 12 days ago

Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

119725


Wafer Sizes:

12"/300mm


Vintage:

Unknown


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View All

TEL / TOKYO ELECTRON

ACT 12

verified-listing-icon
Verified
CATEGORY
Coaters & Developers
Last Verified: 12 days ago
listing-photo-9bdffaba72e64f9c843776124c2cf090-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

119725


Wafer Sizes:

12"/300mm


Vintage:

Unknown


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Single Block (Resist Developer)
Configuration
No Configuration
OEM Model Description
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.
Documents

No documents

Similar Listings
View All