Description
Asset Description - Cleaning Wafer Software Version - NA CIM - SECS / Gem Process - Cobalt backside cleanConfiguration
System Type Description Quantity Status Main System SEZ203 1 OK Others NA 0 OK Factory Interface SMIF 2 OK Options System UPS 1 Handler System Robot 1 OKOEM Model Description
The SEZ 203 Spin-Processor is a single wafer processing system that can use up to three different chemical solutions in a programmable sequence for processing wafers. It is capable of processing wafers with sizes of 125mm, 150mm, and 200mm. It has options like Endpoint Detection System, ozone processing, and contamination-free robot handling. It supports applications such as Photolithography Yield Enhancement, Back Surface Metal Clean, and Silicon Etch. The system can recycle, heat, and filter chemical solutions or use them in a single pass mode.Documents
Verified
CATEGORY
Wet Etch
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
137329
Wafer Sizes:
8"/200mm
Vintage:
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / SEZ
SP203
CATEGORY
Wet Etch
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
137329
Wafer Sizes:
8"/200mm
Vintage:
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available