The SEZ 323 is a spin-processing system designed for high throughput cleaning and film removal applications for 300 mm semiconductor wafer processing. It has a robot on a linear tracking system that transports wafers from four cassettes to two identical process chambers that can apply up to three chemicals each. The system has a SEMATECH-compliant graphical user interface and touch screen, and offers options such as a retrofit kit for processing 200 mm wafers, a rinse and dry module, endpoint detection, and more. It supports applications such as cleaning, etching, backside etch & clean, silicon substrate etch, and wafer reclaim.

Lam Research Corporation acquired SEZ Group, the leading supplier of single-wafer clean technology and products to the global semiconductor manufacturing industry.

LAM RESEARCH / SEZ

SP323

TEL / TOKYO ELECTRON

CELLESTA +

The DV-34BF is part of the Da Vinci Series, a single-wafer processing technology platform designed for high-volume manufacturing. It addresses new cleaning requirements for polymer removal and backside etch and clean, providing high-throughput and accurate wafer cleaning to maximize device yields. The four-chamber system performs a wide range of back-and frontside processes on 300 mm wafers and is optimized for emerging technologies such as high-k dielectrics, new metal gates, and non-volatile memory devices. It offers optimized process performance, high throughput, minimized footprint, advanced handling, reduced media consumption, flexible chemistry application, higher reliability, resulting in low CoO.

DV-34BF

The Spin Etcher 201 is a single wafer etching machine that can chemically etch one side of a wafer without damaging the other. It can handle 6" to 8" wafers and use up to three different chemicals in one process cycle. The system is fully automatic, with a cassette-to-cassette handling system, and has a flexible control system. It also has a minimized clean room footprint due to its Through-the-wall design.

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

Wet Etch

Overview

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Manufacturers of Wet Etch

Top Products for Wet Etch

SP323

CELLESTA +

DV-34BF

SP201