Description
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1. Check Intensity: ① Average value: 567.222 Uniformity (≤2.5%) : 1.777 2. Light source energy (mj): ① 100msec: 50.1 ② 200msec: 100.3 ③ 400msec: 199.9 ④ 800msec: 400 3. Flatness test: Max-Min (≤3um): 2.100 Local flatness (≤1um): 1.230 Clean stage fail, adjust loading position Y from -128800 to -128200, Max-Min (≤3um): 1.690 Local flatness (≤1um): 0.890 4. BST test (≤0.5um): 0.074 5. Chip leveling: ① X (≤1.5sec): 0.036 ② Y (≤1.5sec): -0.065 6. STEPPING (≤0.08um): X: 0.036 / Y: 0.030 7. Pre-alignment: Average (X: -14.946 / Y: -9.486 / T: 10.402) 3δ (X: 4.60 / Y: 21.374 / T: 25.035) 8. Reticle rotation: abs (≤20nm): 18 3δ (≤20nm): 3 9. ORT: ORTM: -0.127 ORTM90: 1.085 ≤0.1: 0.099sec 10. Reticle blind setting accuracy: XL (+0.4 to +0.8mm): 0.550 (+0.4 to 0.8mm) XR (+0.4 to +0.8mm): 0.560 (+0.4 to 0.8mm) YL (+0.4 to +0.8mm): 0.560 (+0.4 to 0.8mm) YR (+0.4 to +0.8mm): 0.560 (+0.4 to 0.8mm) 11. Distortion: X MIN: 68 X MAX: 55 Y MIN: 64 Y MAX: 24 12. Overlay: X Mean: -15.5 Y Mean: 8.1 X 3δ: 93 Y 3δ: 110.2 X (Mean + 3δ): 108.5 Y (Mean + 3δ): 118.3 13. DIS: MAX: X=0.037, Y=-0.037 MIN: X=-0.066, Y=-0.044 14. INC: UR-LL: 0.181 UL-LR: -0.074OEM Model Description
The NSR-2205i11D offers a resolution of 350nm or better and features a numerical aperture (NA) of 0.63. It utilizes an i-line (365nm) exposure light source and has a reduction ratio of 1:5. The exposure field ranges from a 22mm square to 17.9(H) x 25.2(V)mm. The alignment accuracy, using the EGA method, is 70nm or better. The system is equipped with the LSA alignment system as standard, and optionally offers the FIA and LIA alignment systems.Documents
Verified
CATEGORY
Steppers & Scanners
Last Verified: 5 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
142605
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
NIKON
NSR-2205i11D
CATEGORY
Steppers & Scanners
Last Verified: 5 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
142605
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available