Description
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1. Check intensity: ① Average value: 577.186 ② Uniformity: 1.306 (≤ 2.5%) 2. Light source energy (mj): ① 100 msec: 50.3 ② 200 msec: 100.5 ③ 400 msec: 200.7 ④ 800 msec: 401.5 3. Flatness test: ① Max-Min (≤ 3um): 1.77 ② Local flatness (≤ 1um): 0.74 4. Chip leveling: ① X (≤ 1.5 sec): 1 ② Y (≤ 1.5 sec): -0.735 Update: X: -5 → -9 Y: -5 → -3 Chip leveling: ① X (≤ 1.5 sec): 0.332 ② Y (≤ 1.5 sec): 0.028 5. BST test (≤ 0.5um): 0.231 6. Stepping (≤ 0.07um): X: 0.035 / Y: 0.036 7. Pre-alignment: Average (X: 8.358 / Y: 20.167 / T: 27.028) 3δ (X: 4.975 / Y: 7.056 / T: 7.154) 8. Overlay: LSA: X+ (Mean + 3δ) = 119.1 Y+ (Mean + 3δ) = 167.6 Update: X: 0.366 → 0.376 Y: 0.658 → 0.684 Rmag: 0.2264 → 0.2364 Overlay: LSA: X+ (Mean + 3δ) = 94.2 Y+ (Mean + 3δ) = 162.1 9. DIS MAX X = 0.034 Y = 0.045 MIN X = -0.034 Y = -0.021 10. INC: UR-UL: -0.143 UL-LR: -0.131OEM Model Description
The NSR-2205i11D offers a resolution of 350nm or better and features a numerical aperture (NA) of 0.63. It utilizes an i-line (365nm) exposure light source and has a reduction ratio of 1:5. The exposure field ranges from a 22mm square to 17.9(H) x 25.2(V)mm. The alignment accuracy, using the EGA method, is 70nm or better. The system is equipped with the LSA alignment system as standard, and optionally offers the FIA and LIA alignment systems.Documents
Verified
CATEGORY
Steppers & Scanners
Last Verified: 5 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
142604
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
NIKON
NSR-2205i11D
CATEGORY
Steppers & Scanners
Last Verified: 5 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
142604
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available