Description

Software Version - MCSV 2.41, OCSV 2.41 CIM - SECS Photolithography

Configuration

Handler - WL Type 2 Interface - Open Cassette Details Attached

OEM Model Description

The NSR-2205i11D offers a resolution of 350nm or better and features a numerical aperture (NA) of 0.63. It utilizes an i-line (365nm) exposure light source and has a reduction ratio of 1:5. The exposure field ranges from a 22mm square to 17.9(H) x 25.2(V)mm. The alignment accuracy, using the EGA method, is 70nm or better. The system is equipped with the LSA alignment system as standard, and optionally offers the FIA and LIA alignment systems.

Documents

nikon_lens_data.pdf

NIKON

NSR-2205i11D

Verified

Steppers & Scanners

Last Verified: Today

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

146728

Wafer Sizes:

8"/200mm

Vintage:

1996

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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