Description
PVD SystemConfiguration
- 1 Degas chamber - 1 Damaclean etch module - 1 TA PVD Chamber - 1 CU HCM PVD Chamber - 1 CU HCM PVD Chamber - 1 CVD TI SIN Chamber - 1 OrienterOEM Model Description
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.Documents
No documents
LAM RESEARCH / NOVELLUS
CONCEPT TWO "C2"
Verified
CATEGORY
MOCVD
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
82117
Wafer Sizes:
8"/200mm
Vintage:
Unknown
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View AllLAM RESEARCH / NOVELLUS
CONCEPT TWO "C2"
Verified
CATEGORY
MOCVD
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
82117
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
PVD SystemConfiguration
- 1 Degas chamber - 1 Damaclean etch module - 1 TA PVD Chamber - 1 CU HCM PVD Chamber - 1 CU HCM PVD Chamber - 1 CVD TI SIN Chamber - 1 OrienterOEM Model Description
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.Documents
No documents