Description
-System is powered by Inova pvd e-chuck power supply. -Brooks automation magnatran 7 -2 sets of cti cryocenics -VAT vacuum valves -PVD CU and PVD TA for wafersConfiguration
-Cu, TA , Etcher -Missing pumpOEM Model Description
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.Documents
No documents
LAM RESEARCH / NOVELLUS
CONCEPT TWO "C2"
Verified
CATEGORY
MOCVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
66181
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / NOVELLUS
CONCEPT TWO "C2"
CATEGORY
MOCVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
66181
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
-System is powered by Inova pvd e-chuck power supply. -Brooks automation magnatran 7 -2 sets of cti cryocenics -VAT vacuum valves -PVD CU and PVD TA for wafersConfiguration
-Cu, TA , Etcher -Missing pumpOEM Model Description
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.Documents
No documents