Description
Comes with Lens Data Updated in September 2023Configuration
No ConfigurationOEM Model Description
The NSR-2205i11D offers a resolution of 350nm or better and features a numerical aperture (NA) of 0.63. It utilizes an i-line (365nm) exposure light source and has a reduction ratio of 1:5. The exposure field ranges from a 22mm square to 17.9(H) x 25.2(V)mm. The alignment accuracy, using the EGA method, is 70nm or better. The system is equipped with the LSA alignment system as standard, and optionally offers the FIA and LIA alignment systems.Documents
NIKON
NSR-2205i11D
Verified
CATEGORY
I-Line
Last Verified: Over 30 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Deinstalled
Product ID:
82614
Wafer Sizes:
6"/150mm
Vintage:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NIKON
NSR-2205i11D
CATEGORY
I-Line
Last Verified: Over 30 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Deinstalled
Product ID:
82614
Wafer Sizes:
6"/150mm
Vintage:
1996
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available