Description
Axcelis HC GSD 200mm Software Version: VM (Virtual Machine) 8.0 CIM: SECS Process: HC Implant (B11, BF2, As and P) No Pumps, Chillers & Abatement 1 Blade ServerConfiguration
Handler System: ARM (Non HPES) Factory Interface: None Handler System Holder: (Non HPES) Options System: Silicon Disk Options System: SEF EGUN Main System: Axcelis GSD 200 E2 Handling System: In air HandlerOEM Model Description
The GSD/200E2 is a 200mm standard high current implanter with a maximum energy of 180KeV. It offers reliable, high productivity and exceptional product control with unmatched cost of ownership. It meets advanced manufacturing requirements through the 180nm node and maintains high throughput for quad implants used for trench doping. It features an Extended Life Source, a Xenon-based Plasma Electron Flood, and real-time dose control for consistent low doses.Documents
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AXCELIS
GSD 200E2
CATEGORY
High Current
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Down
Product ID:
146005
Wafer Sizes:
8"/200mm
Vintage:
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Axcelis HC GSD 200mm Software Version: VM (Virtual Machine) 8.0 CIM: SECS Process: HC Implant (B11, BF2, As and P) No Pumps, Chillers & Abatement 1 Blade ServerConfiguration
Handler System: ARM (Non HPES) Factory Interface: None Handler System Holder: (Non HPES) Options System: Silicon Disk Options System: SEF EGUN Main System: Axcelis GSD 200 E2 Handling System: In air HandlerOEM Model Description
The GSD/200E2 is a 200mm standard high current implanter with a maximum energy of 180KeV. It offers reliable, high productivity and exceptional product control with unmatched cost of ownership. It meets advanced manufacturing requirements through the 180nm node and maintains high throughput for quad implants used for trench doping. It features an Extended Life Source, a Xenon-based Plasma Electron Flood, and real-time dose control for consistent low doses.Documents
No documents