Description
High Current Implanter Exterior Dimensions Width 119.291 in (303.0 cm) Depth 204.331 in (519.0 cm) Height 112.992 in (287.0 cm) Weight 31,481 lb (14,280 kg)Configuration
No ConfigurationOEM Model Description
The GSD/200E2 is a 200mm standard high current implanter with a maximum energy of 180KeV. It offers reliable, high productivity and exceptional product control with unmatched cost of ownership. It meets advanced manufacturing requirements through the 180nm node and maintains high throughput for quad implants used for trench doping. It features an Extended Life Source, a Xenon-based Plasma Electron Flood, and real-time dose control for consistent low doses.Documents
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AXCELIS
GSD 200E2
CATEGORY
High Current
Last Verified: 4 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
147417
Wafer Sizes:
Unknown
Vintage:
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
High Current Implanter Exterior Dimensions Width 119.291 in (303.0 cm) Depth 204.331 in (519.0 cm) Height 112.992 in (287.0 cm) Weight 31,481 lb (14,280 kg)Configuration
No ConfigurationOEM Model Description
The GSD/200E2 is a 200mm standard high current implanter with a maximum energy of 180KeV. It offers reliable, high productivity and exceptional product control with unmatched cost of ownership. It meets advanced manufacturing requirements through the 180nm node and maintains high throughput for quad implants used for trench doping. It features an Extended Life Source, a Xenon-based Plasma Electron Flood, and real-time dose control for consistent low doses.Documents
No documents