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GSD 200E2 high current 90keV Non-HPES handler SMIF Software: 6.4.4 SECS Missing: LPT2200 Roughing Pump x2 Cryo Pump x2 Disk Chiller Source Turbo PumpOEM Model Description
The GSD/200E2 is a 200mm standard high current implanter with a maximum energy of 180KeV. It offers reliable, high productivity and exceptional product control with unmatched cost of ownership. It meets advanced manufacturing requirements through the 180nm node and maintains high throughput for quad implants used for trench doping. It features an Extended Life Source, a Xenon-based Plasma Electron Flood, and real-time dose control for consistent low doses.Documents
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AXCELIS
GSD 200E2
CATEGORY
High Current
Last Verified: 12 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
149514
Wafer Sizes:
8"/200mm
Vintage:
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
GSD 200E2 high current 90keV Non-HPES handler SMIF Software: 6.4.4 SECS Missing: LPT2200 Roughing Pump x2 Cryo Pump x2 Disk Chiller Source Turbo PumpOEM Model Description
The GSD/200E2 is a 200mm standard high current implanter with a maximum energy of 180KeV. It offers reliable, high productivity and exceptional product control with unmatched cost of ownership. It meets advanced manufacturing requirements through the 180nm node and maintains high throughput for quad implants used for trench doping. It features an Extended Life Source, a Xenon-based Plasma Electron Flood, and real-time dose control for consistent low doses.Documents
No documents