Skip to main content
6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
Moov logo

6" Fab For Sale from Moov - Click Here to Learn More
Moov Icon
PLASMATHERM 790
    Description
    No description
    Configuration
    790 RIE System - Max wafer size capable: 8"/200mm - RFPP RF5S 500W RF Generator - Leybold 361C Turbo Pump (Qty 1) - Leybold NT 150/360 Controller - MKS 1160B MFCs (gas configuration listed below) - Chiller - Edwards QDP40 Dry Pump (or equivalent) - Operator Manual and Documentation Gas Configuration consists of: - O2 200sccm - H2 100sccm - CH4 20sccm - CHF3 200sccm Single RIE Chamber Ideal for R&D
    OEM Model Description
    The Plasma-Therm 790 series is a self-contained Reactive Ion Etching (RIE) system that features a showerhead gas distribution system and a water-cooled RF platen. This system is capable of etching silicon, silicon dioxide, and silicon nitride. The chamber can achieve a base pressure in the range of 3x10-5 Torr and can operate within a pressure range of 10mTorr to 100mTorr. The system is controlled by a PC and offers both manual and automatic operation modes. It has four process gases available: CF4, CHF3, SF6, and O2.
    Documents

    No documents

    PLASMATHERM

    790

    verified-listing-icon

    Verified

    CATEGORY
    Dry / Plasma Etch

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    19003


    Wafer Sizes:

    8"/200mm


    Vintage:

    Unknown


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    PLASMATHERM 790

    PLASMATHERM

    790

    Dry / Plasma Etch
    Vintage: 0Condition: Used
    Last Verified6 days ago

    PLASMATHERM

    790

    verified-listing-icon
    Verified
    CATEGORY
    Dry / Plasma Etch
    Last Verified: Over 60 days ago
    listing-photo-mH6ezA2G6pSHTmIHJokMW1jJmmuof34aILxGiZMXLLo-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1689/mH6ezA2G6pSHTmIHJokMW1jJmmuof34aILxGiZMXLLo/88bb932bdd394fe08fab99577b935ae3_214783e4b0834f0baa1b0df66de1b5a01201a_mw.jpeg
    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    19003


    Wafer Sizes:

    8"/200mm


    Vintage:

    Unknown


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    790 RIE System - Max wafer size capable: 8"/200mm - RFPP RF5S 500W RF Generator - Leybold 361C Turbo Pump (Qty 1) - Leybold NT 150/360 Controller - MKS 1160B MFCs (gas configuration listed below) - Chiller - Edwards QDP40 Dry Pump (or equivalent) - Operator Manual and Documentation Gas Configuration consists of: - O2 200sccm - H2 100sccm - CH4 20sccm - CHF3 200sccm Single RIE Chamber Ideal for R&D
    OEM Model Description
    The Plasma-Therm 790 series is a self-contained Reactive Ion Etching (RIE) system that features a showerhead gas distribution system and a water-cooled RF platen. This system is capable of etching silicon, silicon dioxide, and silicon nitride. The chamber can achieve a base pressure in the range of 3x10-5 Torr and can operate within a pressure range of 10mTorr to 100mTorr. The system is controlled by a PC and offers both manual and automatic operation modes. It has four process gases available: CF4, CHF3, SF6, and O2.
    Documents

    No documents

    Similar Listings
    View All
    PLASMATHERM 790

    PLASMATHERM

    790

    Dry / Plasma EtchVintage: 0Condition: UsedLast Verified:6 days ago
    PLASMATHERM 790

    PLASMATHERM

    790

    Dry / Plasma EtchVintage: 1993Condition: UsedLast Verified:14 days ago
    PLASMATHERM 790

    PLASMATHERM

    790

    Dry / Plasma EtchVintage: 0Condition: RefurbishedLast Verified:Over 60 days ago