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KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
  • KLA SP1 DLS
Description
No description
Configuration
- Vacuum handling - Dual type handler (Robot + controller included) - Bright Field option
OEM Model Description
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.
Documents

No documents

PREFERRED
 
SELLER

KLA

SP1 DLS

verified-listing-icon

Verified

CATEGORY
Defect Inspection

Last Verified: Over 60 days ago

Buyer pays 12% premium of final sale price
Key Item Details
Condition:

Used

Operational Status:

Unknown

Product ID:

66180

Wafer Sizes:

12"/300mm

Vintage:

2001

Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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PREFERRED
 
SELLER

KLA

SP1 DLS

verified-listing-icon
Verified
CATEGORY
Defect Inspection
Last Verified: Over 60 days ago
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Buyer pays 12% premium of final sale price
Key Item Details
Condition:

Used

Operational Status:

Unknown

Product ID:

66180

Wafer Sizes:

12"/300mm

Vintage:

2001

Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No description
Configuration
- Vacuum handling - Dual type handler (Robot + controller included) - Bright Field option
OEM Model Description
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.
Documents

No documents

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