Description
0.050 um Defect Sensitivity on Polished Bare Silicon • Enhanced Rough Film Sensitivity • Already upgraded with ENH SS laser • Defect Map and Histogram with Zoom • RTDC (Real Time Defect Classification) • Map to Map • Operator Interface • Blower Unit • Software Version: MX4.20.7188 Installed Options: • DBE Enhancement • GEM/SECS [Comm Port] • GEM/SECS [HSMS] • Oblique • XY CoordinatesConfiguration
No ConfigurationOEM Model Description
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.Documents
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KLA
SP1 DLS
CATEGORY
Defect Inspection
Last Verified: 7 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
138242
Wafer Sizes:
Unknown
Vintage:
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
0.050 um Defect Sensitivity on Polished Bare Silicon • Enhanced Rough Film Sensitivity • Already upgraded with ENH SS laser • Defect Map and Histogram with Zoom • RTDC (Real Time Defect Classification) • Map to Map • Operator Interface • Blower Unit • Software Version: MX4.20.7188 Installed Options: • DBE Enhancement • GEM/SECS [Comm Port] • GEM/SECS [HSMS] • Oblique • XY CoordinatesConfiguration
No ConfigurationOEM Model Description
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.Documents
No documents