SP1 DLS
Category
Defect InspectionOverview
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.
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5
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KLA
SP1 DLS
Defect InspectionVintage: 2001Condition: UsedLast VerifiedOver 60 days agoKLA
SP1 DLS
Defect InspectionVintage: Condition: Parts ToolLast VerifiedOver 60 days agoKLA
SP1 DLS
Defect InspectionVintage: Condition: UsedLast VerifiedOver 60 days agoKLA
SP1 DLS
Defect InspectionVintage: 2002Condition: UsedLast VerifiedOver 60 days ago
