SP1 DLS
Category
Defect InspectionOverview
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.
Active Listings
11
Services
Inspection, Insurance, Appraisal, Logistics
Top Listings
KLA
SP1 DLS
Defect InspectionVintage: 2001Condition: UsedLast VerifiedOver 60 days agoKLA
SP1 DLS
Defect InspectionVintage: 2004Condition: UsedLast VerifiedOver 60 days agoKLA
SP1 DLS
Defect InspectionVintage: Condition: Parts ToolLast VerifiedOver 60 days agoKLA
SP1 DLS
Defect InspectionVintage: 2008Condition: UsedLast VerifiedOver 60 days ago
KLA
SP1 DLS
Defect InspectionVintage: Condition: UsedLast VerifiedOver 30 days agoKLA
SP1 DLS
Defect InspectionVintage: Condition: UsedLast VerifiedOver 60 days agoKLA
SP1 DLS
Defect InspectionVintage: Condition: UsedLast VerifiedOver 60 days agoKLA
SP1 DLS
Defect InspectionVintage: Condition: UsedLast VerifiedOver 60 days ago
