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0.050 um Defect Sensitivity on Polished Bare Silicon Enhanced Rough Film Sensitivity Already upgraded with ENH SS laser Defect Map and Histogram with Zoom RTDC (Real Time Defect Classification) Map to Map Operator Interface Blower UnitOEM Model Description
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.Documents
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KLA
SP1 DLS
CATEGORY
Defect Inspection
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
123843
Wafer Sizes:
Unknown
Vintage:
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
0.050 um Defect Sensitivity on Polished Bare Silicon Enhanced Rough Film Sensitivity Already upgraded with ENH SS laser Defect Map and Histogram with Zoom RTDC (Real Time Defect Classification) Map to Map Operator Interface Blower UnitOEM Model Description
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.Documents
No documents