Description
No descriptionConfiguration
No ConfigurationOEM Model Description
The Surfscan® SP1 is an unpatterned surface inspection system that provides the sensitivity, repeatability, surface quality measurements and throughput capabilities required for 0.18 µm process technologies and beyond. It is designed for wafer, equipment and IC manufacturers. The SP1 provides 0.08 µm sensitivity on well-polished silicon at 95% capture, as well as throughputs of up to 150 wph on 200 mm wafers, and up to 100 wph on 300 mm wafers.Documents
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KLA
SP1 CLASSIC
Verified
CATEGORY
Defect Inspection
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
92341
Wafer Sizes:
Unknown
Vintage:
Unknown
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Logistics Support
Available
Money Back Guarantee
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Transaction Insured by Moov
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Refurbishment Services
Available
KLA
SP1 CLASSIC
Verified
CATEGORY
Defect Inspection
Last Verified: 15 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
92341
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
No ConfigurationOEM Model Description
The Surfscan® SP1 is an unpatterned surface inspection system that provides the sensitivity, repeatability, surface quality measurements and throughput capabilities required for 0.18 µm process technologies and beyond. It is designed for wafer, equipment and IC manufacturers. The SP1 provides 0.08 µm sensitivity on well-polished silicon at 95% capture, as well as throughputs of up to 150 wph on 200 mm wafers, and up to 100 wph on 300 mm wafers.Documents
No documents