Description
Coater Developer Working condition before de-install No missing parts, but Without HDDConfiguration
1. DESCRIPTION 1-1. Left to Right 1-2. Model : Clean track ACT-8 (2C2D) 1-3. WAFER & CARRIER TYPE : 4foup 1-4. System Power Rating : AC 200/220V , 3-Phase for System 1-5. Software Version : #2 2. Main system (2-1, 2-2) 1) Main frame with system controller 2) 4 FOUP SYSTEM - Type : Normal Cassette Type 3) Coater unit - 4 dispense nozzle with temperature controlled lines - RRC pump 4NOZZLE - Rinse nozzle : back /EBR / solvent bath for etch unit - Rinse system : 3 liter 2Tank Buffer tank system 2set - Degas System : Installed - Programmable side rinse - Direct drain type 4) Developer unit (3-1 , 3-2) - RRC nozzle (1ea) for each unit - Dev solution l : 3 liter 2Tank Buffer tank system 2 set - Degas System : Installed - Developer temperature control system - Direct Drain 5) Adhesion Unit (ADH) 1ea 6) Low Temp Hot Plates (LHP)6ea 7) Cup Washer Holder (CWH) 1ea 8) High Presision Hot Plates ( PHP) 3eaOEM Model Description
CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.Documents
TEL / TOKYO ELECTRON
ACT 8
Verified
CATEGORY
Coaters & Developers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
106309
Wafer Sizes:
8"/200mm
Vintage:
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View All
TEL / TOKYO ELECTRON
ACT 8
CATEGORY
Coaters & Developers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
106309
Wafer Sizes:
8"/200mm
Vintage:
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available