Description

ACT8-D Coat Exterior Dimensions Width 61.811 in (157.0 cm) Depth 139.370 in (354.0 cm) Height 105.906 in (269.0 cm) Weight 9,039 lb (4,100 kg)

Configuration

4C4D ACT8 DB System, 4 COT, 4 DEV, 8 PCH, 10 LHP, 3HHP, 2 ADH, 1WEE

OEM Model Description

CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.

Documents

tel_act_8.mp4

TEL / TOKYO ELECTRON

ACT 8

Verified

Coaters & Developers

Last Verified: 20 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

145818

Wafer Sizes:

Unknown

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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