Description

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Configuration

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OEM Model Description

CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.

Documents

Act 8 - Inspection Report.pdf

PREFERRED

SELLER

TEL / TOKYO ELECTRON

ACT 8

Verified

Coaters & Developers

Last Verified: Over 60 days ago

Buyer pays 12% premium of final sale price

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

82824

Wafer Sizes:

8"/200mm

Vintage:

2000

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