Description
Still in use in cleanroom. Complete and operational.Configuration
-Automatic (batch) spin-coating and development – 100mm and 150mm wafers – 2 photoresist dispense lines + 2 syringe lines – 2 photoresist developer lines (spray or puddle) – Spray-coating option – Resists: AZ 1512 HS, AZ 10XT-60, LOR 5AOEM Model Description
Automated resist processing system providing high-throughput performance and supporting wafers up to 300 mm in diameterDocuments
No documents
EVGroup (EVG)
EVG150
Verified
CATEGORY
Coaters & Developers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
96201
Wafer Sizes:
4"/100mm
Vintage:
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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EVGroup (EVG)
EVG150
CATEGORY
Coaters & Developers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
96201
Wafer Sizes:
4"/100mm
Vintage:
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Still in use in cleanroom. Complete and operational.Configuration
-Automatic (batch) spin-coating and development – 100mm and 150mm wafers – 2 photoresist dispense lines + 2 syringe lines – 2 photoresist developer lines (spray or puddle) – Spray-coating option – Resists: AZ 1512 HS, AZ 10XT-60, LOR 5AOEM Model Description
Automated resist processing system providing high-throughput performance and supporting wafers up to 300 mm in diameterDocuments
No documents