Description

No description

Configuration

- Single wafer- Triton platform - 4 chamber with 2 spare slots - Operates full automated, dry in, dry out - 2 loadports for 200mm cassettes - The loadports can be equipped with sensors to map the wafer presence, including cross-slotting and double-slotting - 2x Edge grip end effectors for 200mm - 19'' touch screen display, operating system Windows 7 or newer, operating lanuage is English For more info, please see attahced doc.

OEM Model Description

From its inception to the first delivery in 2013, the Triton platform was designed to be a stable but modular workhorse for all single-wafer wet-processes. The modular build of our tools enables our customer to configure the tool for a mass-production single-process tool as well as a swiss-army knife R&D or prototyping tool – without affecting performance or reliability. -Processing of 3” to 450 mm substrates -Possibility of processing two to three different substrate sizes with minimal or no reconfiguration – and no requalification of the chamber -Patented High-Speed Plating for better throughput and better uniformity – without changing the chemistry