From its inception to the first delivery in 2013, the Triton platform was designed to be a stable but modular workhorse for all single-wafer wet-processes. The modular build of our tools enables our customer to configure the tool for a mass-production single-process tool as well as a swiss-army knife R&D or prototyping tool – without affecting performance or reliability.

-Processing of 3” to 450 mm substrates
-Possibility of processing two to three different substrate sizes with minimal or no reconfiguration – and no requalification of the chamber
-Patented High-Speed Plating for better throughput and better uniformity – without changing the chemistry

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TRITON

GALAXY EL

The GALAXY platform combines years of experience in batch wafer processing with the cutting edge of process control typically only found on single wafer tools. It can grow with process needs suitable for prototyping as well as for mass production. Solvent, acid or Ozone processing is possible. The modular design allows single chamber semi-manual tools up to multiple chambers fully automated platform – manual cassette loading and change over to guardian carriers for full automation is possible. By changing the carrier, different substrate sizes can be processed.

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TRITON

GALAXY EL

GALAXY

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