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TEL / TOKYO ELECTRON TELFORMULA
    Description
    MISSING PARTS: (1 set) Quartz wares - process tube, etc. Software OS: TEL Waves Equipment status: Out of Fab Process: High - K Type: Diffusion Air valve: FUJIKIN Heater: VCM-05-006L (000080470783) MFC, MFM: HORIBA STEC Three phase power: 3Ø AC 400V Single phase power: 1Ø AC 208V Main/APC: CKD Gas: PN2 / O3 / Ar / TEMAH / N2 / OCTANE / TMA Others: KAWASAKI MECHA
    Configuration
    FORMULA 1S-H Process: High - K The furnace subsystem includes the following major components: - Automation system - Heater - Process chamber - Temperature controller - Scavenger - Cooling water unit The gas subsystem includes the following major components: - Gas supply unit - Exhaust - Vacuum line ( for LPCVD systems ) Power box ( consists of the primary power supply and the power control system ) Rapid cooling unit ( option for Fast Thermal Processing Systems ) Pump box ( option for LPCVD systems )
    OEM Model Description
    TELFORMULA is an advanced thermal processing system designed for the production of 65 to 45-nm-node-generation devices and beyond. It offers a reasonable Cost of Ownership (CoO), a short cycle time, and significantly improved process performance. Some of its key features include an ultra-clean, all-quartz reactor, state-of-the-art heater element technology, high-speed wafer-transfer robotics, and in-situ dry gas cleaning technology. TELFORMULA has a wide range of applications, including radical oxidation (LPRO), ultra-thin gate dielectrics formation (oxidation, nitridation), LPCVD (supporting Poly, Sin, SiO2 / Dry gas cleaning), ultra-low temperature LPCVD, and high-k film formation (AIO, HfO, AIO / HfO, HfSiO). With its advanced technology and versatile capabilities, TELFORMULA is an optimal choice for thermal processing in the semiconductor industry.
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    TEL / TOKYO ELECTRON

    TELFORMULA

    verified-listing-icon

    Verified

    CATEGORY
    Thermal Processing

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    72840


    Wafer Sizes:

    12"/300mm


    Vintage:

    2005

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    TEL / TOKYO ELECTRON TELFORMULA

    TEL / TOKYO ELECTRON

    TELFORMULA

    Thermal Processing
    Vintage: 2003Condition: Used
    Last VerifiedOver 60 days ago

    TEL / TOKYO ELECTRON

    TELFORMULA

    verified-listing-icon
    Verified
    CATEGORY
    Thermal Processing
    Last Verified: Over 60 days ago
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/5dda1e4fc82e485c9d3f954bbf525708_94724774354943c48dec72d34ceb246b_mw.png
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/55e6266af895461d9dc2b90e70cd15a8_23197e08e75c4160bf5bf519736e34f4_mw.png
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/2d5a9dc916b841f1928c8840b4fe7554_a383fc78fdae425a96e72feef36115c045005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/696b362ffd314daab43ddc9671016167_14ec986a15ac4b5db390af51827d580045005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/8839ed45d17a4bb89bcb061741b6fde4_b9f5d6a0683f4898a92691d16080812e45005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/aec4c8b13e4247c8b19a1f6d6b30d14f_70b383c35fb94b738ad9df3be0b525bc45005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/5ee83dc47a8c4fb5939250e7a3307850_57add7e082c645ddb895244f3d2423bb45005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/68bf718ff5c94b5ab3d84060b4b6418b_a2aae224b84e40358d6dd36cc139d44245005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/88974912f1184451baa3afd3a986e142_0cfde92c67c846ea954f1a02e9377f9845005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/8c2a8caa3ed440fe8d48bfc7b1b859ed_535c40abca4f4ca3958461fe432dccc845005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/af2afca8dc124a6b862ab877ca060a71_cdb9b6b3c9454bc48b3702cd9e7e47d045005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/e1a1f2bd8c90424d942c4d7d5000e0b8_9e35c42fbca949288e9f29f28a5db79e45005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/e4727f97a1d14d9897a99e5e3eb5e62d_8bf1b4fb20ab4cd99267ede8a50a597545005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/ffa033acdd874a71bb57651c6b8c27cb_7d5e6248401a40a48ab19a26124454f045005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/2f17af07be5c4f2192ff742e36d15f75_a0b814d0ea344323b765fc7e5ca6175c45005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/9ff1d8f3428f48228321fef30ec045cf_756cb23048974a8fbc1ec6eddeb374c545005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/72e91397e8f540a68cd094b215de0ffb_ecf018ec36de477ea6078b9226b76fb045005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/7011652e255a4f0086dab2bb8ebb9cad_1cb9e082e41b4e259aa8c9adc526449345005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/efadb6abd2344867b99c93730e545239_a545a063992e4e76acb5efbcc64fa69b45005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/fe62df6852804faba39391da15f9699a_e5b609ec8e044d6a8345523359aa5b5145005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/c773b05d91c344a8a71ba96887908c8b_8d01a7a3f0c243dda27dbf2cee9e6ea145005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/ffaca2b963de4ac283cfae3080131ba2_1aa5bf4e889945b38a7b33a622810c0045005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/edca6a5b5f934ae9be1ef1f375ebce2a_4bb5dd09682d46d0aa85cfd6456984bd45005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/5888c2fa568b45578e828eb728ea0bcf_cc2337b63ca244929330e8ab6336a55545005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/0feed930790148ed92cace99ca713516_8693f0e5f150484a9bb53443d8e6770545005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/1236282db2b640cfa66e1afcf1ac5b04_4d88101322ac40df803f25a1b22e848945005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/faa0698355954b148986d2cf81ed153b_9b5abc9f5e144891b4835dc30749698c45005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/eef7f70590dd4315b7fff4e4c47c56ae_2cb4808cb2c04549be6c5f3281b685c745005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/eeb6c82ad0de4c54b37090b07d0c41e7_9fff4af5a175464580817bb5822f6f7345005c_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/e569bdcacba94bbdb2699ee2b12644d2_72ab36d8d87d45618d48217cd1eff34c_mw.png
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/49a71a81cf124eb0a2bd4cd8701f8393_3e074f649c074a288a63b4391d3efc351201a_mw.jpeg
    listing-photo-d29f2c9378d44434bd05283b03b9bbff-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/54527/d29f2c9378d44434bd05283b03b9bbff/a00d807ec3cb4280a57aa78a25ea5d19_1_mw.jpg
    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    72840


    Wafer Sizes:

    12"/300mm


    Vintage:

    2005


    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    MISSING PARTS: (1 set) Quartz wares - process tube, etc. Software OS: TEL Waves Equipment status: Out of Fab Process: High - K Type: Diffusion Air valve: FUJIKIN Heater: VCM-05-006L (000080470783) MFC, MFM: HORIBA STEC Three phase power: 3Ø AC 400V Single phase power: 1Ø AC 208V Main/APC: CKD Gas: PN2 / O3 / Ar / TEMAH / N2 / OCTANE / TMA Others: KAWASAKI MECHA
    Configuration
    FORMULA 1S-H Process: High - K The furnace subsystem includes the following major components: - Automation system - Heater - Process chamber - Temperature controller - Scavenger - Cooling water unit The gas subsystem includes the following major components: - Gas supply unit - Exhaust - Vacuum line ( for LPCVD systems ) Power box ( consists of the primary power supply and the power control system ) Rapid cooling unit ( option for Fast Thermal Processing Systems ) Pump box ( option for LPCVD systems )
    OEM Model Description
    TELFORMULA is an advanced thermal processing system designed for the production of 65 to 45-nm-node-generation devices and beyond. It offers a reasonable Cost of Ownership (CoO), a short cycle time, and significantly improved process performance. Some of its key features include an ultra-clean, all-quartz reactor, state-of-the-art heater element technology, high-speed wafer-transfer robotics, and in-situ dry gas cleaning technology. TELFORMULA has a wide range of applications, including radical oxidation (LPRO), ultra-thin gate dielectrics formation (oxidation, nitridation), LPCVD (supporting Poly, Sin, SiO2 / Dry gas cleaning), ultra-low temperature LPCVD, and high-k film formation (AIO, HfO, AIO / HfO, HfSiO). With its advanced technology and versatile capabilities, TELFORMULA is an optimal choice for thermal processing in the semiconductor industry.
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    No documents

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