Description
No descriptionConfiguration
-Is this tool functional? When is the last time that this tool has been running? The tool is not functional. Known issues: Robot connections issues, plating cell power supply drifting current away and not keeping up with recipe target current, CP2 head not working. -Wafer size: Ran at 200mm. We had the 150mm conversion kit. -Single wafer?: Single wafer process head design. Fountain plater with 2 separate plating bath tanks and 2 SRD heads, total of 4 heads. -Is it cassette to cassette? Yes, input cassette on the left nest and output cassette on the right nest. -SDR chambers?: 2 x SRD chambers + 2 x Plating chambers. -Power supply: Dynatronix Model PMC 102/1PR-20-30XR, part # 990-0296-212OEM Model Description
Equinox is a single wafer, multi-chamber process platform for cassette-to-cassette cleaning, etching, developing, and electroplating. It offers configurations from one to six chambers with a centralized controller and robotics. The platform is capable of performing various processes on substrates ranging from 3" to 200mm in size. It works by using a central dual end-effector robot to transfer substrates from cassette to chamber and back again. Equinox can help automate manual steps and transfers while increasing throughput with a small footprint. It offers ultra-clean dry-to-dry operation with uniform plating and etching results. The platform can integrate sequential process steps with a low cost of ownership (CoO) and provides a migration path from small R&D platforms to production systems with the same process chambers and control features.Documents
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SEMITOOL
EQUINOX
Verified
CATEGORY
Spray Solvent / Acid
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
116444
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
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SEMITOOL
EQUINOX
CATEGORY
Spray Solvent / Acid
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
116444
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
-Is this tool functional? When is the last time that this tool has been running? The tool is not functional. Known issues: Robot connections issues, plating cell power supply drifting current away and not keeping up with recipe target current, CP2 head not working. -Wafer size: Ran at 200mm. We had the 150mm conversion kit. -Single wafer?: Single wafer process head design. Fountain plater with 2 separate plating bath tanks and 2 SRD heads, total of 4 heads. -Is it cassette to cassette? Yes, input cassette on the left nest and output cassette on the right nest. -SDR chambers?: 2 x SRD chambers + 2 x Plating chambers. -Power supply: Dynatronix Model PMC 102/1PR-20-30XR, part # 990-0296-212OEM Model Description
Equinox is a single wafer, multi-chamber process platform for cassette-to-cassette cleaning, etching, developing, and electroplating. It offers configurations from one to six chambers with a centralized controller and robotics. The platform is capable of performing various processes on substrates ranging from 3" to 200mm in size. It works by using a central dual end-effector robot to transfer substrates from cassette to chamber and back again. Equinox can help automate manual steps and transfers while increasing throughput with a small footprint. It offers ultra-clean dry-to-dry operation with uniform plating and etching results. The platform can integrate sequential process steps with a low cost of ownership (CoO) and provides a migration path from small R&D platforms to production systems with the same process chambers and control features.Documents
No documents