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    Key Item Details


    Operational Status:unknown

    Product ID:73790

    Wafer Sizes:Unknown



    No description available


    Process Scrubber Software Version (include revision#): V242B000 System Power Rating: 208AC 3-phase Loading Configuration: 3 load ports

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    OEM Model Description

    The Spin Scrubber SS-3000 is a cleaning system used in the semiconductor industry. It features increased processing capacity, C.O.O. reduction and user-friendly operation. The SS-3000 supports next-generation processes using 300 mm wafers and offers a reduced footprint. Its cleaning performance has been greatly enhanced to pass newer, stricter evaluation criteria. The SS-3000 is ideal for the increasingly reduced size of design rules, ensuring an ample process margin. Reduced chemical and DI water use combined with high-speed processing will minimize your running costs. Maintenance and other operations have been extensively automated to facilitate overall operability.

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