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The TCP 9400SE is a high density, low pressure etch system from Lam’s TCP product line. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. The TCP 9400SE is used for polysilicon and polycide etch applications. It operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates with independent power control to the lower electrode, which improves etch results across a wider process window. Lam’s TCP systems are designed to offer customers a reliable, lower cost of ownership solution to their advanced needs. The TCP systems are available as stand-alone, single wafer tools, or on the Alliance multichamber cluster platform.Documents
LAM RESEARCH CORPORATION
TCP 9400SE
Verified
CATEGORY
RIE
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
25815
Wafer Sizes:
Unknown
Vintage:
Unknown
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Refurbishment Services
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LAM RESEARCH CORPORATION
TCP 9400SE
Verified
CATEGORY
RIE
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
25815
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available