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    Key Item Details


    Operational Status:

    Product ID:74474

    Wafer Sizes:Unknown



    Tool is being de-installed in clean room as of July 24, 2019 now is packaged and stored in the warehouse.


    details attached

    OEM Model Description

    The Eagle is a single-wafer processing product platform for PECVD applications. The Eagle 12 is for 300mm wafers.

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