Description
PECVDConfiguration
[Chamber A] Process: P-TEOS Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300) RPU: 400kHz/3000W HRF: 13.56MHz/1000W LRF: 430kHz/1000W [Chamber B] Process: P-TEOS Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300) RPU: 400kHz/3000W HRF: 13.56MHz/1000W LRF: 430kHz/1000W [Chamber C] Process: P-TEOS Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300) RPU: 400kHz/3000W HRF: 13.56MHz/1000W LRF: 430kHz/1000WOEM Model Description
The Eagle is a single-wafer processing product platform for PECVD applications. The Eagle 12 is for 300mm wafers.Documents
ASM
EAGLE 12
Verified
CATEGORY
PECVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
35068
Wafer Sizes:
12"/300mm
Vintage:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ASM
EAGLE 12
CATEGORY
PECVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
35068
Wafer Sizes:
12"/300mm
Vintage:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available