Description

PECVD

Configuration

[Chamber A] Process: P-TEOS/TMP Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300), TMP(60) RPU: 400kHz/3000W HRF: 13.56MHz/1000W LRF: 430kHz/1000W [Chamber B] Process: P-TEOS/TMP Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300), TMP(60) RPU: 400kHz/3000W HRF: 13.56MHz/1000W LRF: 430kHz/1000W [Chamber C] Process: P-TEOS/TMP Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300), TMP(60) RPU: 400kHz/3000W HRF: 13.56MHz/1000W LRF: 430kHz/1000W

OEM Model Description

The Eagle is a single-wafer processing product platform for PECVD applications. The Eagle 12 is for 300mm wafers.

Documents

ASM International Eagle-12 Config..PDF

ASM

EAGLE 12

Verified

PECVD

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

35057

Wafer Sizes:

12"/300mm

Vintage:

2013

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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